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MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING

SCI/SCIE
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
雜志名稱:半導(dǎo)體加工中的材料科學(xué)
簡稱:MAT SCI SEMICON PROC
期刊ISSN:1369-8001
大類研究方向:工程技術(shù)
影響因子:2.722
數(shù)據(jù)庫類型:SCI/SCIE
是否OA:No
出版地:ENGLAND
年文章數(shù):455
小類研究方向:工程技術(shù)-工程:電子與電氣
審稿速度:約1.7個(gè)月
平均錄用比例:約88.33%

官方網(wǎng)站:http://www.elsevier.com/wps/find/journaldescription.cws_home/600849/description#description

投稿網(wǎng)址:http://ees.elsevier.com/mssp/

填單可快速匹配SCI/SSCI/AHCI期刊 解答審稿周期、版面費(fèi)、錄用率問題

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING

英文簡介

Materials Science in Semiconductor Processing provides a unique forum for the discussion of novel processing, applications and theoretical studies of functional materials and devices for (opto)electronics, sensors, detectors, biotechnology and green energy.Each issue will aim to provide a snapshot of current insights, new achievements, breakthroughs and future trends in such diverse fields as microelectronics, energy conversion and storage, communications, biotechnology, (photo)catalysis, nano- and thin-film technology, hybrid and composite materials, chemical processing, vapor-phase deposition, device fabrication, and modelling, which are the backbone of advanced semiconductor processing and applications.Coverage will include: advanced lithography for submicron devices; etching and related topics; ion implantation; damage evolution and related issues; plasma and thermal CVD; rapid thermal processing; advanced metallization and interconnect schemes; thin dielectric layers, oxidation; sol-gel processing; chemical bath and (electro)chemical deposition; compound semiconductor processing; new non-oxide materials and their applications; (macro)molecular and hybrid materials; molecular dynamics, ab-initio methods, Monte Carlo, etc.; new materials and processes for discrete and integrated circuits; magnetic materials and spintronics; heterostructures and quantum devices; engineering of the electrical and optical properties of semiconductors; crystal growth mechanisms; reliability, defect density, intrinsic impurities and defects.

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING

中文簡介

半導(dǎo)體加工中的材料科學(xué)為討論光電子、傳感器、探測器、生物技術(shù)和綠色能源的功能材料和器件的新加工、應(yīng)用和理論研究提供了一個(gè)獨(dú)特的論壇。每一期將致力于提供當(dāng)前的快照的見解、新成果,突破和未來趨勢等不同領(lǐng)域的微電子、能源轉(zhuǎn)換和存儲、通信、生物技術(shù)(圖)催化、納米薄膜技術(shù),混合和復(fù)合材料、化學(xué)處理、氣相沉積、設(shè)備制造、和造型的支柱先進(jìn)半導(dǎo)體加工和應(yīng)用。覆蓋范圍將包括:用于亞微米設(shè)備的先進(jìn)光刻技術(shù);蝕刻及相關(guān)課題;離子注入;損害演化及其相關(guān)問題;等離子體和熱CVD;快速熱處理;先進(jìn)的金屬化和互連方案;介質(zhì)層薄,氧化;溶膠-凝膠法加工;化學(xué)浴和(電)化學(xué)沉積;化合物半導(dǎo)體加工;新型非氧化物材料及其應(yīng)用(宏觀)分子和雜化材料;分子動(dòng)力學(xué)、從頭算方法、蒙特卡羅方法等;分立電路和集成電路的新材料和新工藝;磁性材料和自旋電子學(xué);異質(zhì)結(jié)構(gòu)和量子器件;半導(dǎo)體光電特性工程;晶體生長機(jī)制;可靠性,缺陷密度,固有雜質(zhì)和缺陷。

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING

中科院分區(qū)
大類學(xué)科 分區(qū) 小類學(xué)科 分區(qū) Top期刊 綜述期刊
工程技術(shù) 3區(qū) ENGINEERING, ELECTRICAL & ELECTRONIC 工程:電子與電氣 MATERIALS SCIENCE, MULTIDISCIPLINARY 材料科學(xué):綜合 PHYSICS, APPLIED 物理:應(yīng)用 PHYSICS, CONDENSED MATTER 物理:凝聚態(tài)物理 3區(qū) 3區(qū) 3區(qū) 3區(qū)

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING

JCR分區(qū)
JCR分區(qū)等級 JCR所屬學(xué)科 分區(qū) 影響因子
Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY Q2 4.644
PHYSICS, APPLIED Q2
PHYSICS, CONDENSED MATTER Q2
ENGINEERING, ELECTRICAL & ELECTRONIC Q2

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING

中科院JCR分區(qū)歷年趨勢圖

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING

影響因子
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